Electret-based Energy Harvesting Device with Parylene Flexible Springs
نویسندگان
چکیده
A MEMS vibration-driven electret generator for energy harvesting has been developed. Parylene high-aspect-ratio flexible spring is employed to support the seismic mass with high-performance patterned electret. The seismic structure enables large in-plane oscillation amplitude of 1 mm and low resonant frequency of 37Hz. With our early prototype, we have obtained 21 Vp-p voltage output, corresponding to output power of 0.27 μW with an external road of 100 MΩ.
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